JPH0478904U - - Google Patents
Info
- Publication number
- JPH0478904U JPH0478904U JP12125790U JP12125790U JPH0478904U JP H0478904 U JPH0478904 U JP H0478904U JP 12125790 U JP12125790 U JP 12125790U JP 12125790 U JP12125790 U JP 12125790U JP H0478904 U JPH0478904 U JP H0478904U
- Authority
- JP
- Japan
- Prior art keywords
- support layer
- upward flow
- filled
- tank
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12125790U JPH0630242Y2 (ja) | 1990-11-21 | 1990-11-21 | ▲ろ▼過装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12125790U JPH0630242Y2 (ja) | 1990-11-21 | 1990-11-21 | ▲ろ▼過装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0478904U true JPH0478904U (en]) | 1992-07-09 |
| JPH0630242Y2 JPH0630242Y2 (ja) | 1994-08-17 |
Family
ID=31869121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12125790U Expired - Lifetime JPH0630242Y2 (ja) | 1990-11-21 | 1990-11-21 | ▲ろ▼過装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0630242Y2 (en]) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102413263B1 (ko) | 2008-09-19 | 2022-06-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 |
-
1990
- 1990-11-21 JP JP12125790U patent/JPH0630242Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0630242Y2 (ja) | 1994-08-17 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |